Influence of annealing treatment on thermoelectric properties of antimony telluride and bismuth telluride films deposited by dc magnetron sputtering technique for thermoelectric generator applications

อิทธิพลของการอบอ่อนต่อสมบัติทางเทอร์โมอิเล็กทริกของฟิล์มแอนติมอนีเทลไรด์ และบิสมัทเทลลูไรด์ปลูกโดยเทคนิคดีซีแมกนี-ตรอนสปัตเตอริงสำหรับนำไปประยุกต์ใช้เป็นเทอร์โมอิเล็กทริกเจนเนอเรเตอร์

Name: Supasak Kianwimol

LCSH: Thermoelectric cooling

Abstract: In this study, compared the thermoelectric properties and compatibility factors of n-Bi₂Te₃ and p-Sb₂Te₃ films deposited by direct current magnetron sputtering for thermoelectric generator applications. The n- Bi₂Te₃ was more crystalline than p-Sb₂Te₃ since the formation energy of n-Bi₂Te₃ was lower than that of p-Sb₂Te₃. The carrier concentration of p-Sb₂Te₃ increased, whereas that of n-Bi₂Te₃ decreased because some Te evaporated during annealing. The Seebeck coefficient of p-Sb₂Te₃ and n-Bi₂Te₃ was inversely proportional to the carrier concentration. The electrical conductivity of the annealed p-Sb₂Te₃ increased more than that of annealed n-Bi₂Te₃, owing to the changed mobility and carrier concentration. Crystallization was the main factor enhancing the thermal conductivity. The highest figure of merit achieved from the annealed p-Sb₂Te₃ was ~0.5 and for n-Bi₂Te₃ -0.25, at 513 K. Both annealed n-Bi₂Te₃ and p-Sb₂Te₃ had appropriate compatibility factors, differing by a factor < 2. To design geometric cross -sectional areas of the thermocouple legs with electrical and thermal conductivity from annealed film condition. The fabrication method of the prototype necessary 3 masks, two for p-Sb₂Te₃ and n-Bi₂Te₃ deposition and last one for electrode (Cu). The archived thermoelectric generator has an are approximately 140x36x1.1 mm3 . The flexible thermoelectric generator generated maximum of open circuit output voltage about 32 mV and maximum output power about 3.2 µW at 40 K different temperature. The open circuit output voltage with heat from human body was generated about 1.52 mV

King Mongkut's Institute of Technology Ladkrabang. Central Library

Address: BANGKOK

Email: Lifelong@kmitl.ac.th

Name: Aparporn Sakulkalavek

Role: Thesis Advisor

Email : aparporn.sa@kmitl.ac.th

Created: 2021

Modified: 2566-05-25

Issued: 2023-05-25

วิทยานิพนธ์/Thesis

application/pdf

eng

DegreeName: Doctor of philosophy

Level: Doctoral Degree

Descipline: Applied Physics

Grantor: King Mongkut's Institute of Technology Ladkrabang

©copyrights King Mongkut's Institute of Technology Ladkrabang

ลำดับที่.	ชื่อแฟ้มข้อมูล	ขนาดแฟ้มข้อมูล	จำนวนเข้าถึง	วัน-เวลาเข้าถึงล่าสุด
1	Supasak Kianwimol.pdf	9.11 MB	3	2025-10-08 18:55:13

ใช้เวลา

0.030291 วินาที