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Amonrat Khambun. Preparation and characterization of crain thin film by reactive magnetron sputtering method. Doctoral Degree(Physics). Burapha University. Library. : Burapha University, 2017.
Preparation and characterization of crain thin film by reactive magnetron sputtering method
Name: Amonrat Khambun
ThaSH:
Thin films
ThaSH:
วิทยานิพนธ์
-- ปริญญาเอก
ThaSH:
วิทยานิพนธ์
-- ภาษาอังกฤษ
Abstract:
CrAlN thin films were grown on Si and glass slides by reactive magnetron co-sputtering method without external heating and biasing to the substrates. The effect of N2 gas flow rate, Al sputtering current and deposition time on the structure of the as-deposited films was investigated. The crystal structure, thickness, roughness, microstructure, surface morphology, chemical composition and hardness were characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), field emission scanning electron microscopy (FE-SEM), energy dispersive X-ray spectroscopy (EDS) and nanoindentation technique, respectively. The XRD results showed that all the films were formed as solid solution with fcc phase, except the film deposited at IAl = 600, 900 mA showed an amorphous. The crystallinity of the films varies with the deposition parameter. Furthermore, the AFM and FE-SEM technique revealed that the average roughness of the films corresponded to the films thickness. The cross section analysis by FE-SEM showed columnar structure and dense morphology. The chemical compositions of all films from EDS show that the films compose of Cr, Al and N in different ratios, depending on the deposition parameters. The hardness of the as-deposited CrAlN films was in the range of 25 39 GPa, which vary with phase, crystallite size and Al contents of the films.
Burapha University. Library
Address:
CHONBURI
Email:
buulibrary@buu.ac.th
Name: Nirun Witit-anun
Role:
Principal advisor
Created:
2017
Modified:
2565-02-23
Issued:
2019-07-24
วิทยานิพนธ์/Thesis
application/pdf
CallNumber:
Th 530.4175 Am523P
eng
DegreeName: Doctor of Philosophy
Level: Doctoral Degree
Descipline: Physics
Grantor: Burapha University
©copyrights Burapha University
RightsAccess:
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0.020864 วินาที
Amonrat Khambun
| Title | Contributor | Type |
|---|---|---|
| Preparation and characterization of crain thin film by reactive magnetron sputtering method
มหาวิทยาลัยบูรพา Amonrat Khambun | Nirun Witit-anun | วิทยานิพนธ์/Thesis |
Nirun Witit-anun
| Title | Creator | Type and Date Create |
|---|---|---|
| Nano-titanium dioxide thin film in application for photokilling of selected bacteria
มหาวิทยาลัยบูรพา Nirun Witit-anun;Pichan Sawangwong;Adisorn Buranawong | Suree Thongwanitniyom | วิทยานิพนธ์/Thesis |
| Synthesis and characterisation of CaCO3 filler from paphia undulata shells for biodegradable composite film
มหาวิทยาลัยบูรพา Nirun Witit-anun | Wichian Siriprom | วิทยานิพนธ์/Thesis |
| Preparation and characterization of crain thin film by reactive magnetron sputtering method
มหาวิทยาลัยบูรพา Nirun Witit-anun | Amonrat Khambun | วิทยานิพนธ์/Thesis |